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更新: 30 September, 2023
The Turbo-V 3K-G system is an advanced solution for thin film applications. It is the only truly "integrated" system in the market, with a fully integrated system with on-board power supply, vent/purge valves control capability, integrated diagnostics, and multiple interface capability. The system also has the lowest power absorption thermal efficiency, new double loop SST cooling channel, reduced power consumption, reduced bearing operating temperature, and oil-free, robust and reliable design. It is the best turbo solution for thin film deposition with the best footprint to performance ratio.
文件格式: PDF
体积: -
MD5: 34AFC8F6A581776209E1AF51FC87F90A
发布时间: 03 July, 2012
下载: -
连接: Agilent The Turbo-V 3K-G System An Advanced Solution for Thin Film Applications 说明书 PDF