Agilent The Turbo-V 3K-G System An Advanced Solution for Thin Film Applications 说明书

The Turbo-V 3K-G system is an advanced solution for thin film applications. It is the only truly "integrated" system in the market, with a fully integrated system with on-board power supply, vent/purge valves control capability, integrated diagnostics, and multiple interface capability. The system also has the lowest power absorption thermal efficiency, new double loop SST cooling channel, reduced power consumption, reduced bearing operating temperature, and oil-free, robust and reliable design. It is the best turbo solution for thin film deposition with the best footprint to performance ratio.

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厂商: 安捷伦

文件类型: PDF

文件大小: 603 KB

文件校验: 34AFC8F6A581776209E1AF51FC87F90A

上传时间: 2012-07-03 15:32:00

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